Design for Manufacturability with Advanced Lithography (Hardcover)

Design for Manufacturability with Advanced Lithography Cover Image
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Description


Introduction.- Layout Decomposition for Triple Patterning.- Layout Decomposition for Other Patterning Techniques.- Standard Cell Compliance and Placement Co-Optimization.- Design for Manufacturability with E-Beam Lithography.- Conclusions and Future Works.-



Product Details
ISBN: 9783319203843
ISBN-10: 3319203843
Publisher: Springer
Publication Date: November 23rd, 2015
Pages: 164
Language: English